Document Type

Article

Publication Date

1985

Publication Title

Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films

Volume

3

Issue

6

First Page Number

2501

Last Page Number

2502

DOI

10.1116/1.572822

Publisher Statement

© 1985, American Vacuum Society. Available on publisher's site at http://dx.doi.org/10.1116/1.572822.

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