Faculty Advisor

Christopher A. Brown

Abstract

Horizontal scanning instruments, such as, atomic force microscopes and scanning laser microscopes, acquire three-dimensional topographic maps of surfaces, at scales ranging from tenths of nanometers to hundreds of millimeters, by measuring elevations along a series of traces scanning a region of the surface. Random and systematic errors may influence parameters calculated from these topographic maps. This work investigates anisotropic artifacts in atomic force microscope and a scanning laser microscope measurements by looking at difference between parameters calculated in the tracing and scanning directions. It is found that horizontal scanning profiling instruments systematically introduce anisotropic measurement artifacts when measuring both isotropic and anisotropic surfaces.

Publisher

Worcester Polytechnic Institute

Degree Name

MS

Department

Manufacturing Engineering

Project Type

Thesis

Date Accepted

2002-01-08

Accessibility

Unrestricted

Subjects

Anisotropy, Scanning Instruments, Scanning, Surface Metrology, Surface, Fractal, Scanning systems, Atomic force microscopy, Anisotropy, Three-dimensional imaging

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