Micro-Electromechanical Systems (MEMS) manufacturers face difficulties in characterizing material properties of MEMS post production. Properties such as stiffness can be obtained from simultaneous force and displacement measurements in full-field. We developed a prototype MEMS metrology system that uses a sub-micro Newton resolution force probe operating under a nanometer resolution interferometer to characterize MEMS mechanical properties. FEA simulations and analytical calculations were performed to help determine system constraints and validate results. Precision actuators were integrated and controlled from a developed graphical user interface. The system was tested on an Analog Devices ADXL202 accelerometer.
Worcester Polytechnic Institute
Electrical and Computer Engineering
Major Qualifying Project
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