Faculty Advisor

Furlong-Vazquez, Cosme

Abstract

Micro-Electromechanical Systems (MEMS) manufacturers face difficulties in characterizing material properties of MEMS post production. Properties such as stiffness can be obtained from simultaneous force and displacement measurements in full-field. We developed a prototype MEMS metrology system that uses a sub-micro Newton resolution force probe operating under a nanometer resolution interferometer to characterize MEMS mechanical properties. FEA simulations and analytical calculations were performed to help determine system constraints and validate results. Precision actuators were integrated and controlled from a developed graphical user interface. The system was tested on an Analog Devices ADXL202 accelerometer.

Publisher

Worcester Polytechnic Institute

Date Accepted

April 2017

Major

Mechanical Engineering

Major

Electrical and Computer Engineering

Major

Robotics Engineering

Major

Mathematical Sciences

Project Type

Major Qualifying Project

Accessibility

Unrestricted

Advisor Department

Mechanical Engineering

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