Pryputniewicz, Ryszard J.
Recent advances in microelectromechanical systems (MEMS) technology have led to development of an array of new sensors, many of which rely on vibrations of either sensing elements. Regardless of their applications, sensors are always designed to provide the most sensitive responses to the signals they are developed to detect. One way to describe this sensitivity is to use the Quality factor (Q-factor). Most recent experimental evidence indicates that as physical sizes of sensors decrease, the corresponding Q-factors decrease. This paper develops a preliminary model of Q-factors of MEMS resonators using Analytical, Computational, and Experimental Solutions (ACES) methodology to investigate the effects of various damping mechanisms on the Q-factor of micro mechanical resonators.
Worcester Polytechnic Institute
Major Qualifying Project
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