Faculty Advisor

Furlong-Vazquez, Cosme

Abstract

This project investigates an approach to imaging with thermally actuated MEMS based devices. By using interferometry and advanced phase unwrapping algorithms for processing data, the feasibility of generating high-resolution grayscale images in real-time was proven. Analysis of the response of a thermal imaging detector consisting of an array of pixels defined by surface micromachined bi-material beam structures was carried out. Using the interferometric setup, the pixels' response as a function of temperature was characterized. Experimental results were used with analytical and computational models to further predict the thermo-mechanical characteristics of the beams and to perform parametric investigations and optimization of their design.

Publisher

Worcester Polytechnic Institute

Date Accepted

April 2009

Major

Mechanical Engineering

Major

Robotics Engineering

Project Type

Major Qualifying Project

Accessibility

Unrestricted

Advisor Department

Mechanical Engineering

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