Currently, Saint-Gobain Abrasives team uses the Chemical Mechanical Planarization (CMP) process to manufacture multiple products. Cubic Boron Nitride grain orientation has not been optimized which could increase the life of the conditioning pad integral to the CMP process. Our team designed a set of experiments to obtain the optimal grain angle to increase the maximum bonding force thus increasing the life of the conditioner tool. We analyzed each new angle and assembled a final optimal grain orientation.
Worcester Polytechnic Institute
Major Qualifying Project
All authors have granted to WPI a nonexclusive royalty-free license to distribute copies of the work, subject to other agreements. Copyright is held by the author or authors, with all rights reserved, unless otherwise noted.