Faculty Advisor

Rong, Yiming

Center

Wuhan, China

Abstract

Currently, Saint-Gobain Abrasives team uses the Chemical Mechanical Planarization (CMP) process to manufacture multiple products. Cubic Boron Nitride grain orientation has not been optimized which could increase the life of the conditioning pad integral to the CMP process. Our team designed a set of experiments to obtain the optimal grain angle to increase the maximum bonding force thus increasing the life of the conditioner tool. We analyzed each new angle and assembled a final optimal grain orientation.

Publisher

Worcester Polytechnic Institute

Date Accepted

April 2014

Major

Mechanical Engineering

Project Type

Major Qualifying Project

Accessibility

Unrestricted

Advisor Department

Mechanical Engineering

Advisor Program

Mechanical Engineering

Project Center

Wuhan, China

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