Faculty Advisor

Daniello, Robert

Abstract

Worcester Polytechnic Institute has an unused and very valuable piece of equipment in the basement of Higgins Lab. This piece of equipment is the Photolithography machine. It has not been running in a decade and would cost an incredible amount to have it sent in to be fixed. A machine like that would be very useful for research purposes due to the uses of photolithography in micro builds and circuits. The purpose of this MQP was to build a mechanical work around for the old mask aligner system and allowing the machine to be revived in the future. The precision of this work around has been undefined but expected to be within a few microns with plans laid out for improvements.

Publisher

Worcester Polytechnic Institute

Date Accepted

April 2019

Major

Mechanical Engineering

Project Type

Major Qualifying Project

Accessibility

Unrestricted

Advisor Department

Mechanical Engineering

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